Layer termination from ellipsometric facts is completely integrated into Aeres®. Many different multi-wavelength and spectroscopic ellipsometry methods are offered Along with the ion beam sputter deposition technique.

In-situ optical checking and Command is on the market by way of Angstrom’s optical monitoring & Handle package deal.

An optional cryogenic pump improves base pressure and pumping speed and can be isolated through the chamber throughout reactive processes with oxygen.

In-situ ellipsometry presents critical information on the effectiveness of the optical film while it truly is being deposited.

Our Reticle® ion beam sputter deposition programs are made and engineered to produce exact optical films of the highest purity, density, and balance.

Variable angle levels let for quite impressive slender film methods. Nonetheless, one of its biggest problems is reproducibility. The substrate is usually established at an extremely oblique angle in relation towards the supply, as well as the films are incredibly delicate towards the precision of this angle.

Angstrom Engineering® patterns and engineers Each individual Reticle® platform to provide our associates from the optics Tungsten materials for electronics Group a chance to build the movies they want with outstanding purity, density, and uniformity, all in a highly repeatable and automatic style.

Our unique layout permits immediate or indirect monitoring of the variable angle stage, removing the necessity for tooling elements or even a witness glass changer. Find out more about the Optical Monitoring & Manage package below.

IBSD processes can also hire a secondary ion supply for substrate cleansing and energetic aid, substrate heating for reactive deposition, As well as in-situ optical checking or ellipsometry for critical layer thickness termination. 

All conventional Reticle® platforms incorporate yet another gridless conclude-Corridor ion source with hollow cathode neutralizer.

one diploma. Individuals wonderfully slim tolerances make it possible for us to repeatedly produce very precise nanostructures. I am able to say wholeheartedly the solution and service Angstrom Engineering® sent has actually been wonderful.

Self-aligned ion optics are configured especially for the specified deposition prerequisites and geometry within your method.

A reduced-frequency neutralizer guarantees secure beam operation without contamination from a standard filament.

Dynamic uniformity shaping is reached utilizing a flux correction protect between the deposition resource and the substrate.

Thoughtful structure of your ion beam concentrating optics confines the beam solely to the world in the focus on, removing any danger of contamination.